Four built-in high-resolution source /monitor units, 2-voltage source units; 2-voltage monitor units

Develops new process technologies and evaluates materials with measurements to 1 fA and 0.2 uV

Full Kelvin; force, sense, and guard terminals for each HRSMU

Performs quasi-static capacitance measurements versus voltage measurements

Automatically extracts process parameters without manually manipulating screen markers

Measures leakage characteristics with ultra-low leakage SMUs

Automates device characterization with integrated pulse generators and selector switches

Performs on-wafer reliability tests with built-in stressing modes

Performs point-and-click measurements with graphical user interface

Provides graphical data analysis capabilities with a Windows environment

Knob sweep function verifies each probe is making contact

Stand-by mode eliminating need for external power supplies

Triggering modes allow synchronized AC/DC measurements

IBASIC user functions that allows all data to be plotted and analyzed